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capaNCDT 6500

Nanometer multi-channel system

多通道超高精度電容式位移量測系統

電容式位移計是專為高精度量測任務而設計。capaNCDT 6500 多通道量測系統提供了亞奈米級的解析度，其控制器最高響應頻率可高達 7.8kHz (數位4通道) 或是 8.5kHz (8通道)。除了類比輸出之外，也能使用 EtherCAT介面。EtherCAT 能夠實現即時準確的資料傳輸，高速整合到現有的量測環境和多系統的同步。capaNCDT 6500 系統的設置和配置，也能夠使用web介面輕鬆完成。

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產品特性

  1. 量測行程 (mm): 0.05 | 0.2 | 0.5 | 0.8 | 1 | 2 | 3 | 5 | 10
  2. 解析度 max. 0.0375nm
  3. 線性度 max. 0.01µm
  4. 響應頻率 8.5kHz (-3dB)
  5. 資料輸出 (數位) 7.8kHz
  6. 類比輸出 (電壓/電流)
  7. 乙太網路, EtherCAT
  8. 模組化設計 – 可擴充至8通道
  9. 外掛或是嵌入式訊號放大器
  10. 透過Web介面簡易設定參數
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Luigi Yang
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超高解析度

capaNCDT 6500系統設計用於需要亞奈米解析度的量測任務。在半導體行業和實驗室應用的精密定位量測，它的優勢表現得尤其出色。模組化的 capaNCDT 6500 專為多通道應用而設計。通過訊號放大器，最多可連接多達八個感測器到控制器端。

Laptop with web interface

通過Web界面就能簡單操作

完善的Web界面能簡易的完成控制器和感測器的設定流程，無需使用任何額外的軟體。網路界面可通過乙太網路，並提供訊號雜訊演算法、濾波和其他參數（如觸發，測量值存儲和線性化）的設置和配置選項。

Controller capaNCDT 6530 - Capacitive controller with sub-nanometer resolution

The capacitive DT6530 controller offers maximum resolution and signal stability for capacitive displacement measurement. The controller can be operated with up to 8 channels and is not only suitable for electrically conductive objects, but also for insulators. In addition to analogue outputs, the controller is also equipped with an Ethernet digital interface. The DT6530 controller is compatible with all sensors and cables of the capaNCDT series.

Characteristics

  1. Resolution dynamic 0.002 % FSO (8.5kHz)

  2. Frequency response 8.5kHz (-3 dB) (switchable 20Hz; 1kHz; 8.5kHz)

  3. Analogue output 0...10V (short circuit proof), 4...20mA; 0...20mA

  4. Digital interface Ethernet 24 Bit; EtherCAT

  5. Special tuning: up to quadruple standard cable length

Mounting frame for double-sided thickness measurement

The mounting frame is designed for use with capacitive sensors for two-sided thickness measurements and helps to align the measuring points with one another. The frame allows for the sensors to lie exactly on one axis, meaning that the measuring points are arranged congruently. This prevents measurements at an offset and a reliable measurement result is achieved with the highest possible precision. The mounting frames provide space for up to 6 sensors. Two sensors each form a measuring point.

Characteristics

  1. Multi-track thickness measurement at up to 3 points simultaneously

  2. High temperature stability for precise measurements at temperatures of up to 100 °C

  3. Suitable for vacuum

  4. Extremely compact design

  5. Easy integration and retrofitting in existing systems

  6. Compatible with capaNCDT sensors

  7. Calibratable design for high precision in thickness measurements

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