電容式位移計探頭
Micro-Epsilon 提供全系列的電容式位移感測器。 這些電容式感測器用於位移、位置以及厚度測量。 不同的感測探頭設計可實現與機台和系統的最佳整合。 capaNCDT 感測器在線性度、溫度穩定性和解析度方面提供了最好的性能。 在一般的工業環境中可以達到亞微米精度,在潔淨環境中甚至可以達到亞奈米精度。
Characteristics
-
Measuring ranges (mm): 0.05 | 0.2 | 0.5 | 0.8 | 1 | 1.25 | 2 | 3 | 5 | 10
-
Linearity from 0.15 µm
-
Temperature range -50 ... +200 °C
-
Target diameter from Ø 3 mm
-
capaNCDT controller for double the measuring range (reduced accuracy) or half the measuring range (increased accuracy)
-
Vacuum-compatible versions available
Characteristics
-
Measuring ranges (mm): 0.5 | 1.25 | 2 | 3
-
Linearity from 0.5 µm
-
Temperature range -50 ... +200 °C
-
Target diameter from Ø6 mm
-
capaNCDT controller for double the measuring range (reduced accuracy) or half the measuring range (increased accuracy)
-
Thread for extremely stable installation
Characteristics
-
Measuring ranges (mm): 0.1 | 0.2 | 0.25 | 0.5 | 1 | 1.2 | 2
-
Linearity from 0.054 µm
-
Temperature range -50 ... +200 °C
-
Target diameter from Ø7 mm
-
capaNCDT controller for double the measuring range (reduced accuracy) or half the measuring range (increased accuracy)
-
Vacuum-compatible versions available
Characteristics
-
Measuring ranges (mm) 0.2 | 0.5 | 1 | 1.2 | 2 | 3
-
Linearity from 0.05 µm
-
Temperature range -50 ... +200 °C
-
Target diameter from Ø7 mm
-
capaNCDT controller for double the measuring range (reduced accuracy) or half the measuring range (increased accuracy)
-
Vacuum-compatible versions available
-
Flat design ensures space-saving installation